CO2 Injection & Bubbler

Dissolves CO₂ into deionized (DI) water to reduce surface electrical resistance of wafers and display glass — reduces defect rates in semiconductor and display manufacturing.

Two product types:
  • CO₂ Injection Membrane Module (e.g., MDB-2108P)
  • CO₂ Bubbler Device
Patent-protected. Real-time data transfer system included.
Key applications: Semiconductor wafer cleaning (Scrubber, Lithography, Mask, CMP, Dicing), Display glass cleaning
Two product types:
  • CO₂ Injection Membrane Module (e.g., MDB-2108P)
  • CO₂ Bubbler Device
Patent-protected. Real-time data transfer system included.
Key applications: Semiconductor wafer cleaning (Scrubber, Lithography, Mask, CMP, Dicing), Display glass cleaning
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